Introducing the Dragon CVD™
Structured Materials Industries, Inc. has released its new induction heated Chemical Vapor Deposition tool for Very High Temperature and Low Pressure Operation – theDragon CVD™ tool. Designed to operate at deposition process temperatures through 2200 degrees Centigrade at low pressures, the Dragon CVD tool presents researchers with a significant new tool to research high temperature deposition processes. This tool was designed and built in collaboration with Penn State University Electro-Optics Center and addresses both high temperature CVD and PVT.
Carbides
Oxides
Si, SiGe, SiGeC, SiGeSn, SiGeSnC, etc. for batteries
Si, SiGe, SiGeC, SiGeSn, SiGeSnC, etc. for thermoelectrics
III-Vs (arsenides, phosphide, antimonides, etc.)
II-VIs (
Carbides (SiC, Metal carbides)