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MOCVD of Chalcogenide Films for Phase Change Memory Applications
Oxides
Si, SiGe, SiGeC, SiGeSn, SiGeSnC, etc. for batteries
Si, SiGe, SiGeC, SiGeSn, SiGeSnC, etc. for thermoelectrics
III-Vs (arsenides, phosphide, antimonides, etc.)
II-VIs (
Carbides (SiC, Metal carbides)
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