MOCVD System Upgrade & Refurbishment
Structured Materials Industries, Inc. provides specialized engineering services to Upgrade or refurbish pre-existing MOCVD equipment. SMI has a long history in manufacturing MOCVD tools and components and has now extended this capability to enhance and extend the life of aging systems. This service extends to tools from all MOCVD vendors as well as to enhancing home built R&D systems.
Rotating Disc Reactors
• Emcore/Veeco
• Thomas Swan
• Many others
Non-Rotating Disc Reactors
• Aixtron
• Many others
Homebuilt Reactor/System
• Horizntal
• Vertical
• Other
Gas Delivery Systems
• Bubbler, Sublimator, Gas, and Flash Evaporator Sources
• Purifiers
• Switching Manifolds
• Dopant Dilution Manifolds
• Pressure Control Systems
Control Systems
• Replace old hardware
• Upgrade ease of operation
• Streamline functions
• Mimic screen / spreadsheet format
Exhaust Systems
• Special gas handling system
• Custom filter requirements
Improved Spare Parts
• Passivated surfaces
• Alternative materials